Laser-based mask defect repair systems
The laser-based mask defect repair systems are intended to repair photomasks with transparent and opaque defects.
A contour-projection method is used to form an optical image for the repair of opaque defects. Transparent defects are repaired through the laser-stimulated vapor deposition of metal-organic compounds. Defects are detected automatically on the bases of the defect file formed at the inspection stage.
If you require any further information, feel free to contact us:
DEPARTMENT OF MARKETING:
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Phone: |
+375 17 223 71 28, |
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E-mail: |
office@planar.by |
