Application: the chucks are intended to fix accurately silicon, glass, ceramic wafers during processing. The high accuracy of glass surface processing ensures high flatness (planarity) of the wafers being processed.
Specifications
Material
glass ceramic, optical glass, metal
Overall Dimensions
200 x 200 mm glass ceramic to 500 x 500 mm metal
Size Mesa Diameter
0.1 mm and more
Mesa Height
0.02 - 0.5 mm
Deviation of Flat LensTops from The Normal
0.15 mm for glass ceramic and glass (determined by surface preparation)
