Broadband Dielectric Mirrors

Material BK-7, fine annealed optical glass Diameter Tolerance 12.7-101.6 mm (0.5-4.0 in.) +0/-0.13mm 152.4 - 203.2 mm (6.0 - 8.0 in.) +0/-0.25 mm Center Thickness Tolerance (Tc) 12.7-101.6 mm (0.5-4.0 in.) ±0.25 mm 152.4 - 203.2 mm (6.0 - 8.0 in.) ±0.38 mm Clear Aperture > central 80% of diameter Chamfers 12.7 - 25.4 mm (0.5 - 1.0 in.) 0.25-0.76 mm face width x45°± 15° 30-101.6 mm (1.181-4.0 in.) 0.38-1.14 mm face width x45°±15° 152.4 - 203.2 mm (6.0 - 8.0 in.) 0.51-1.52 mm face width x45°± 15° S2 Surface Ground Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended Damage Threshold 1000 W/cm2 CW, 10 mJ/cm2 with 10 nsec pulses within the wavelength range

Wavelength Range (nm) Reflectivity (average) Angle of Incidence 488—694 Rs, Rp >99% 0-45° 700-950 Rs>99%,Rp>98% 0-45° 632.8 Ravg >80% 0-45°

High Energy Excimer Laser Mirrors

Material UV grade fused silica S1 Surface Accuracy λ/10 at 632.8 nm over clear aperture S2 Surface Flatness λ /10 at 632.8 nm over clear aperture Clear Aperture > central 80% of diameter Surface Quality 40 - 20 scratch-dig Diameter Tolerance +0/-0.25 mm Thickness Tolerance ±0.5 mm Wedge > 3 arc min Chamfer 25.4 mm diameter: 0.25—0.76 mm face width x45±15º 50.8 mm diameter: 0.38—1.14 mm face width x45±15º Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended Damage Threshold 1 MW/ cm2 CW, 1 wavelength J/cm2 with 10 nsec pulses at the center

Laser Type Central Wavelength (nm) Angle of Incidence Reflectivity ArF 193 0° Runpol>98% KrF 248 0° Rs, Rp>99% XeCl 308 0° Rs, Rp>99% XeF 351-353 0° Rs, Rp>99% ArF 193 45° Runpol>95% KrF 248 45° Rs, Rp>99% XeCl 308 45° Rs, Rp>99% XeF 351-353 45° Rs, Rp>99%

High Energy ND:Yag Laser Mirrirs

Material UV grade fused silica Surface Flatness S1 λ /10 at 632.8 nm over clear aperture Surface Flatness S2 λ /10 at 632.8 nm over clear aperture Clear Aperture >= central 80% of diameter Surface Quality 40 - 20 scratch-dig Diameter Tolerance +0/-0.25 mm Thickness Tolerance ±0.5 mm Wedge <= 3 arc min Chamfer 25.4 mm diameter: 0.25-0.76 mm face width x45±15° 50.8 mm diameter: 0.38-1.14 mm face width x45±15° Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended Damage Threshold 1064 nm: 5 MW/cm2 CW, 5 J/cm2 with 0.1-100 nsec pulses 532 nm: 2.5 MW/cm2 CW, 2.5 J/cm2 with 0.1-100 nsec pulses 354.7 nm: 1 MW/cm2 CW, 1 J/cm2 with 0.1-100 nsec pulses 266 nm: 1 MW/cm2 CW, 1 J/cm2 with 0.1-100 nsec pulses

Laser Type Wavelength (mm) Angle of Incidence Reflectivity Nd:YAG (1) 1064 0° Rs>99.7%,Rp>99% Nd:YAG (2) 532 0° Rs>99.7%,Rp>99% Nd:YAG (3) 354.7 0° Rs>99.7°/o,Rp>99% Nd:YAG (4) 266 0° Rs>99.7%,Rp>99% Nd:YAG (1) 1064 45° Rs>99.7%,Rp>99% Nd:YAG (2) 532 45° Rs>99.7%,Rp>99% Nd:YAG (3) 354.7 45° Rs>99.7%,Rp>99% Nd:YAG (4) 266 45° Rs>99.7%,Rp>99%

Laser Broadband 45° Mirrors

Material BK-7, grade A, precision annealed optical glass Surface Flatness λ /10 at 632.8 nm over clear aperture Clear Aperture >= central 80% of diameter Surface Quality 40 - 20 scratch-dig Diameter Tolerance +0/-0.25 mm Edge Thickness Tolerance (Te) ±0.38 mm Wedge 30±15arc min Chamfer 0.5±0.25 mm face width x45± 15° Angle of Incidence 0-10° S1 Coating Rs>99%, 700-930 nm, Rp>99%, 730-870 nm S2 Coating None Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended

Laser High Reflecting Pump Mirrors

Material BK-7, fine annealed optical glass S1 Surface Accuracy Plano, λ /10 flatness at 632.8 nm over the clear aperture Concave, λ /5 irregularity at 632.8 nm over the clear aperture S2 Surface Flatness Concave, λ /10 at 632.8 nm over clear aperture Clear Aperture >= central 80% of diameter Surface Quality 40 - 20 scratch-dig Diameter Tolerance +0/-0.25 mm Edge Thickness Tolerance (Te ) ±0.25 mm Wedge Flat mirror, 30±15 arc. min Chamfer 0.5±0.25 mm face width x45± 15° Angle of Incidence 0-15° S1 Coating Rs,Rp>99%, 710-890 nm, Ts, Tp>95%, 488-532 nm, 0-20° AOI S2 Coating Broadband, multilayer antireflection coating, Ravg <0.5%,430-700 nm, 0-15° AOI Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recommended

Specification

Diameter Tolerance 12.7-101.6 mm (0.5-4.0 in.) +0/-0.13mm 152.4 x 203.2 mm (6.0 x8.0 in.) +0/-0.25mm Center Thickness Tolerance (Tc) 12.7-101.6 mm (0.5-4.0 in.) ±0.25 mm 152.4 x203.2 mm (6.0 x 8.0 in.) ±0.38 mm Clear Aperture > central 80% of diameter Chamfers 12.7 x25.4 mm (0.5 x 0.1 in.) 0.25-0.76 mm face width x45°± 15° 30-101.6 mm (1.181-4.0 in.) 0.38-1.14 mm face width x45°± 15° 152.4 x 203.2 mm (6.0 x 8.0 in.) 0.51-1.52 mm face width x45°± 15° S2 Surface Ground Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue are recomended Damage Threshold WL=325 nm, 500 W/cm2 CW, 0.25 J/cm2 with 10 nsec pulses at 325nm WL=1064 nm, 1000 W/cm2 CW, 10 J/cm2 with 10 nsec pulses within the wavelength range All others, 1000 W/cm2 CW, 0.5 J/cm2 with 10 nsec pulses within the wavelength range

Laser Type Central Wavelenght (nm) Wavelength Range (nm) Reflectivity Angle of Incidence HeCd 325 325 Rs,Rp>99% 0-45° HeCd 441.6 441.6 Rs,Rp>99% 0-45° Argon-Iron 488—514.5 488—514.5 Rs,Rp>99% 0-45° HeNe 632.8 632.8 Rs,Rp>99% 0-45° Nd:YAG 1064 1030-1090 Rs,Rp>99% 0-45° Diode 1300 1290-1350 Rs,Rp>99% 0-45° Diode 1550 1520—1580 Rs,Rp>99% 0-45°