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Laser Treatment System EM-250
The system is designed for material division, dimensional treatment and cutting out according to a preset contour arbitrary forms in substrates of alumina, silicon and other materials used in microelectronics, instrument engineering and other fields.
RL-30Q solid-state YAG-laser with Q-switch operating in TEM00 mode is applied in the system. Power supply and laser cooling unit has the system of choosing and stabilizing of cooling water temperature that allows to maintain high stability of middle-power radiation level. The blocking of the values of min cooling water flow and max temperature allows increase laser reliability and longevity.
Service life of laser heat is at least 10000 hours. Service life of pump lamp is at least 400 hours.
Linearly step drive (LSD) is applied in the system and allows achieve high precision treatment under linear travel speed up to 400mm/c with speed irregularity not more than 5%. The absence of frictions in the drive provides high longevity and excludes any adjustments during the operation.
The system is controlled by IBM PC. Working program is made both with the use of own graphics editor and AUTOCAD editor. The use of the computer allows automatically make choice of optimal drive travel algorithm and laser Q-switch control depending on treated material thickness, forms and contour sizes of laser treatment.
The object image received by means of TV-system is directly displayed on computer monitor. This enables alignment and editing of a preset contour of the object and the video. During laser processing the monitor displays the modes and process model of the treatment.
The thickness of the treated plates is up to 2 mm.
Specifications
Laser
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| *Type |
Q-switched, Nd:YAG, Lamp pump |
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| *Operating mode |
TEM00 |
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| *Wave Length |
1064 nm |
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| *Average Power |
15 Watt @ 3kHz |
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| *Pulse Width |
~ 85 ns @ 3 kHz |
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| Q-Switch Frequency |
1-25 kHz |
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Positioning System
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| Field Size |
150 õ 150 mm |
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| Accuracy |
+15 µm |
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| Resolution |
2 µm |
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| Speed of movement during processing (contour) |
0.1 - 10 mm/s |
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| Speed of linear movement |
up to 400 mm/s |
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| Angle of turn |
360º |
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| Power requirements |
380/220 V, 50 Hz, 6,5 kW |
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| Overall dimensions |
1870x850x1300 mm |
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| Weight |
550 kg |
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Viewing Optics TV-channel enables receipt on sVGA monitor “live“ videopicture of the object for orientation of the workpiece followed by inspection of the quality of processing.
Control and Software System The control system is based on PC and provides the following:
- control to all drives in automatic processing mode and orientation mode;
- storage and automatic selection of treatment modes according to preset process parameters;
- editing of layout to be processed in AUTOCAD system as DXF file;
- editing of scribing layout within its own program;
- control to average laser power with display of pictogram on computer screen;
- control to R.F. driver;
- display on computer screen of TV-picture of surface of the substrate during its angular and position orientation;
- display on TV-screen of the on-line information (absolute and relative coordinates of the stage, process steps,
prompting of operations sequence, treatment time, error warning,etc.);
- execution of special debugging operations (search for beam focus, its alignment with Zero of coordinate system, scaling of coordinate system, etc.);
- creation and storage of the library of programs of operations including type of operation (via cutting, scribing), layout pattern and list of process parameters;
- power-units diagnostics.
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