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EM-6190A
EM-6190A Prober is intended to ensure electrical contact between probes and of IC contact pads on wafers.
The system ensures:
•automatic contacting according to the preset program;
•wafer inspection result mapping into conformance groups;
•display output of wafer inspection results;
•wafer inspection result output on a peripheral device;
•chip marking with paint.
The system can be additionally equipped with a loader
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| SPECIFICATIONS |
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| Working area, mm |
460õ220 |
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| Wafer diameter, max, mm |
200 |
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| Contact accuracy, µm |
±8 |
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| Contact accuracy (using a video pattern system), µm |
±5 |
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| Drive type |
LSM |
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| Õ speed, max, mm/sec |
250 |
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| Y speed, max, mm/sec |
250 |
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| Õ speedup, max, g |
1.0 |
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| Y speedup, max, g |
0.8 |
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| Positioning accuracy, µm |
0.5 |
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| Vacuum, MPa |
0.5 … 0.6 |
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| Power consumption |
230V, 50Hz |
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| Overall dimensions, mm |
800õ800õ1500 |
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| Weight, kg |
500 |
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