Analytical Submicron Prober EM-6040À
The EM-6040A Analytical Submicron Probe is designed to ensure electrical contact between probes and IC pads placed on wafer, semiconductor chip pattern elements and micron metallized buses of micrometer and submicrometer sizes, to provide visual inspection of structures as well as to locate separate elements during diagnostics of internal IC block condition under normal and higher temperature ranges.
The EM-6040A is a manual tabletop prober.
It is provided to equip the system with semiconductor wafer heater for testing under higher temperature.
The use of an ultrasonic cutter makes it possible to isolate the faulty element cutting metallized buses.
The EM-6040A Analytical Submicron Prober consists of:
- a positioner;
- a microscope;
- a microscope transferring unit;
- 6 manual micromanipulators with holders for analytical probes;
- a wafer heater;
- an ultrasonic cutter.
Specifications
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| Wafer diameter |
up to 150 mm |
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| Die size, max |
0.4x0.4 ... 20x20 mm |
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| Minimum size of element to be contacted |
0.8 mkm |
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| Wafer chuck temperature |
50...150°C |
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| Microscope magnification |
25 to 2000x |
|
| Power requirements |
230 V, 50 Hz, up to 0.8 kW |
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| Overall dimensions |
700x620x630 mm |
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| Weight |
140 kg |
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