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Laser Mask Repair System EM-5001B
EM-5001B system is intended for repairing masks (reticles) having transparent and opaque defects: pindots, protrusions, shorts between features, missing features, corner rounding, pinholes, mouse bites, breaks, size shifts, etc. The system repairs defects on chrome, chrome-oxide, iron-oxide coated reticles having the following SEMI standard sizes:
- 4”x4” (102x102 mm)
- 5”x5” (127x127 mm)
- 6”x6” (153x153 mm)
- 7”x7” (178x178 mm)
For repair of opaque defects, a contour path-projection method of optical imaging is used: the image is sythesized as a result of the laser beam step-by-step tracing around a contour path, the laser beam cross-section being a microprojection of a simple figure, for example a square.
Advantages of the method:
- high pattern accuracy is determined by a minimal-edge-roughness capability and ensured by a rectangular shape of the image forming feature as well as by the image forming feature as well as by the uniform energy distribution in it;
- high resolution;
- minor energy loss in a reticle.
To repair opaque defects the system uses Lotis LS-2122M laser with wave length of 532 nm. Transparent defects are repaired through the laser stimulated deposition of metal-organic compounds. As a radiation source, the argon 185F02 Spectra Physics laser is used.
Specifications
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| Working field size |
153 x 153 mm |
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| Size defects repaired: |
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| transparent |
Ø2 to 25 µm |
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| opaque |
1 x 1 µm to 25x25 µm |
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| Angular position of a feature (area under repair) |
0 to 45° |
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| Accuracy of lase beam pointing at a defect |
0.5 µm |
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| Opaque defect programmable size resolution with reference to X-Y |
0.1 µm |
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| Overall dimensions (mm): |
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| machine unit |
520x1320x1230 mm |
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| control unit |
300x710x1745 mm |
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| laser power supply rack |
553x693x1059 mm |
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| Weight |
1660 kg |
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