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Equipment for mask pattern generation and inspection

Precision pattern generators

Special application pattern generator

Automatic mask inspection

Systems for inspection of work masks

Laser-based mask defect repair systems

Photorepeaters

Equipment for wafer pattern generation and inspection

Equipment for wafer projection imaging

Large-area steppers

Equipment for direct writing on wafers

Tools for proximity exposure and double-side lithography

Wafer inspection equipment

Chip Preparation Equipment

Probers

Wafer Grinders

Dicing Saws

Die Control and Cassetting Systems

Assembly and Packaging Equipment, Laser Processing

Die Bonders

Wire Bonders

Wafer Bonders

IC Pretreatment Equipment

Laser Processing Equipment

Microscopy

Microelectronics Microscopes

Material Science

Biology

Medical Equipment

Cardiology

Equipment for mask pattern generation and inspection

English MainProducts › Equipment for mask pattern generation and inspection

The range of the equipment for making the patterns on photomasks includes pattern generators, automatic inspection systems, laser photomask repair systems and photorepeaters.Development and production of the all models range is based on the long-term design and production experience of our company using the most update technology.

Development and production of the full set of the equipment for the photomask pattern manufacturing is a unique feature which allows to have ideal compatibility of all the equipment.

- the possibility of receiving overall compatibility of tools frames;
- the same control algorithms of stages travel;
- united approach to compensation construction of coordinate system;
- uniform system of design data converting for pattern generator and mask inspection system;
- the possibility of creating united data format by forming of database topology defects and defects classification;
- maximum unification of control system, user-friendly interface in Russian, so significantly reduce the cost of personnel training and equipment maintenance.


Precision pattern generators
Special application pattern generator
Automatic mask inspection
Systems for inspection of work masks
Laser-based mask defect repair systems
Photorepeaters


Russian version
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